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Citation: Sun H, Gao X, Liu L, Tao L, Yao J (2024). Curriculum Design of "Microelectronics Device Process Experiments" Based on an Integrated Circuit Process Experimental Teaching Simulation Platform. J. Edu. Res. Rev. 12(6):98-103. doi: 10.33495/jerr_v12i6.24.107.
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To address the substantial investment demands and scarcity of advanced integrated circuit (IC) mass production process equipment in traditional "Microelectronics Device Process Experiments" courses, an innovative IC process teaching simulation platform is introduced to reformulate the experimental curriculum. This approach encompasses the development and implementation of 17 experiments spanning two primary domains: pivotal IC manufacturing processes and crucial device fabrication techniques. Unlike conventional schematic simulation demonstrations, this simulation platform utilizes real-world industrial-grade simulators, enabling the numerical determination of device characteristics and process properties through the application of relevant physical models. Furthermore, the manufacturing process equipment emulated on the platform is intricately aligned with the theoretical course knowledge points within the specialized field. This methodology fosters students' proficiency in operating essential equipment, designing parameters, and analyzing outcomes in authentic manufacturing environments, thereby preparing them to meet the contemporary knowledge and skill requirements of the IC manufacturing industry.

Keywords  Integrated Circuit   Integrated Circuit Process   Microelectronic Devices   Device Process  

 Teaching Simulation